文章摘要
杨辰烨,雷静桃.阿基米德曲线形双晶压电执行器的设计与分析[J].电子机械工程,2020,36(2):1-4
阿基米德曲线形双晶压电执行器的设计与分析
Design and Analysis of PZT Bimorph Actuator with Archimedes′ Spiral Actuating Tethers
  
DOI:
中文关键词: 阿基米德曲线  压电执行器  有限元分析  电极构型
英文关键词: Archimedes′ spiral  piezoelectric actuator  finite element analysis  electrode pattern
基金项目:2019 上海市浦江人才计划资助项目(19PJ1403900);国家自然科学基金资助项目(51775323)
中图分类号:TN61
作者单位
杨辰烨 上海大学 
雷静桃 上海大学 
摘要点击次数: 108
全文下载次数: 0
中文摘要:
      文中开展了具有阿基米德曲线形驱动臂的微机电系统(Micro-Electro-Mechanical System, MEMS)双 晶压电执行器的设计、模拟仿真以及实验验证。 为验证不同设计的表现,分别设计并制造了全驱动型和半驱 动型压电执行器。 这2 种压电执行器通过商业化的生产工艺制造,与更复杂的 MEMS 系统兼容。 采用有限元 法分析了2 种执行器的位移与驱动力,还开展实验分别测试了 2 种执行器的位移与驱动力。 研究表明,在相 同的驱动电压下,全驱动型压电执行器的性能优于半驱动型压电执行器。 当驱动电压为 110 V 时,半驱动型 和全驱动型执行器的实验测量位移分别约为17 μm 和29 μm,相应的驱动力的实验测量值分别约为 9 mN 和 15 mN,实验结果与有限元分析结果相符。 仿真和实验结果表明文中提出的执行器设计方案是合理的。
英文摘要:
      The design, finite element analysis (FEA) and experimental verification of a MEMS out-of-plane translational lead-zirconate-titanate (PZT) bimorph actuator supported on Archimedes′ spiral tethers are pres- ented in this paper. Two types of bimorph actuators with different electrode patterns (with spiral tethers half actuated or fully actuated) are designed and fabricated. Both designs are fabricated by commercial processes and are compatible with integration into more complex MEMS systems. FEA is used to analyze and predict the displacements and blocking forces of both types of actuators. The deflections and blocking forces of both types of actuators are measured experimentally to validate the design. The result shows that the actuator with fully- actuated tethers has produced larger deflection and blocking force than the actuator with half-actuated tethers at the same driving voltage. At an applied voltage of 110 V, the out-of-plane deflections of the actuators with half-actuated and fully-actuated tethers are measured at about 17 μm and 29 μm respectively. The correspond- ing blocking forces are measured at about 9 mN and 15 mN. Experimental results are in good agreement with FEA predictions. The results demonstrate the validity of the actuator designs.
查看全文   查看/发表评论  下载PDF阅读器
关闭

分享按钮